Probe Stations
The term ‘Probe Station’ covers a wide range of devices used to position analytical or test probes for non-destructive electrical testing at various locations on test samples. The examples here show a wide variety of different sizes and types available for use in semiconductors, material science, physics, optics, and MEMS. All have been tailored specifically for the end user’s unique access, range, temperature and test requirements. These are intended to show the range of possibilities from the MTS custom design and fabrication shop and the list is hardly exhaustive. Please contact us to discuss your particular needs.
Medium Sample Size – 3″-4″ (75-100 mm)
Designed for versatile mid-range wafer and substrate handling in ultra-high vacuum environments, this station features:
- Based around 10″ (CF250) flanges for optimal access
- Up to 8 high-precision probe manipulators
- Operation from UHV (<10⁻⁹ torr) to ambient pressure
- Sample heating to >900°C in controlled atmospheres (including O₂)
- Cryogenic cooling options to <10K with LHe
- Large optical viewing ports with radiation shutters
- Full XY travel covering entire sample surface
- High-precision micromanipulators <0.0001″ (<2 µm) resolution
- Motorized and computerized stage options available
- Multiple instrumentation feedthroughs and additional ports
- Vibration isolation integration
- Custom microscope integration for high-magnification access