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UHV In-Vac Manipulators

Our UHV IN-VACUUM Manipulators deliver precise, reliable linear translation for tools and samples entirely within ultra-high vacuum chambers with no bulky and fragile bellows for superior vacuum integrity down to 10⁻¹¹ mbar. Engineered with high-rigidity crossed-roller guides and bakeable to 200°C, these manipulators offer stock stroke lengths up to 12" (and longer by request), and micron-level resolution piezo drives ensuring contamination-free performance in demanding surface science, deposition, and analysis applications.

In-UHV Linear Manipulators
2 AXES IN VACUUM MANIPULATOR
2 AXES IN VACUUM MANIPULATOR
In-UHV Rotary Manipulators