GLAD Glancing-Angle Deposition System
Advanced UHV-Compatible Sample Manipulation with Polar Rotation, Azimuthal Rotation, and Swappable Heating/Cooling
The GLAD is a precision-engineered, UHV-compatible glancing-angle deposition system designed for cutting-edge thin-film and nanostructure research. This robust platform enables precise control over sample orientation and temperature, facilitating glancing-angle deposition processes in vacuum environments. Featuring a differentially pumped rotary platform (DPRF) for smooth polar rotation and integrated azimuthal drive, the GLAD supports field-swappable sample holder heads for seamless transitions between high-temperature heating and cryogenic cooling, making it ideal for diverse experimental needs in materials science and surface analysis.
Precision Rotation and Orientation
Achieve exact sample positioning with independent polar and azimuthal rotations. The DPRF provides ±90° polar rotation of sample heads, with a vernier scale for accurate angle indication and repeatable operation. Azimuthal rotation is driven by a 0-24 VDC motor through a right-angle gearbox, delivering variable speeds from 0-18 RPM for uniform deposition. Limit cautions ensure safe use: do not exceed 100° or go below 260° in polar rotation to protect the mechanism.
Wide-Range Temperature Control
The GLAD offers versatile temperature management with field-swappable heads:
- IR Heated Rotatable Sample Holder: Features a 4" OD heated area on a 4.5" OD sample holder, powered by 0-120 VAC infrared heaters (4 x 1000W bulbs) for rapid radiant heating. Design temperature up to 750°C, with a Type K thermocouple for precise monitoring and closed-loop control. Heating rate not to exceed 200°C per minute; do not apply power outside vacuum or vent above 150°C.
- Liquid Nitrogen Cooled Sample Holder: Provides a 4" square cooled area on a 4.5" square sample holder, using convoluted tubing connected to LN₂ feedthroughs for efficient cryogenic cooling. Includes a Type K thermocouple for temperature sensing, enabling stable low-temperature operation.
Field-swappability allows quick changes between heated and cooled configurations using simple tools like supplied wrenches.
Integrated Manual Shutter and Accessories
A manual shutter with actuator rod and clamp provides on-demand sample protection during deposition. Included accessories enhance usability: hex wrench kit, open-end wrenches (1/2" x 9/16" and 11/16" x 3/4"), and a lubrication kit with high-temperature silicone/MoS₂ grease for bearings and clear silicone grease for worm gears.
Reliable UHV Design and Integration
Constructed from high-quality, vacuum-compatible materials with WS2-coated bearings for low-friction performance, the GLAD mounts via a standard ConFlat®-type flange using 0.080" thick flat copper gaskets and non-seize coated bolts. All components are selected for clean UHV operation, with helical flex couplings and ceramic spacers ensuring durability and alignment. The system integrates easily with existing vacuum chambers, pumping systems, and control setups. Replacement parts, including IR bulbs and bearings, are available on a fast-turnaround basis. For maintenance, relubricate after every bakeout above 150°C.
Custom configurations are our specialty—contact us to discuss adaptations for your specific UHV chamber, deposition setup, or application requirements.
Suggested bake-out temperature: 150°C (do not exceed 200°C; remove motors and wiring beforehand).