Custom designed UHV chambers

Our custom-designed UHV chambers provide a robust, high-performance platform for ultra-high vacuum applications in research, surface science, and advanced materials processing. Constructed from premium 304L or 316L stainless steel (other materials are available on request), these chambers deliver exceptional strength, low outgassing, and reliable performance down to pressures below 10^{-11} Torr after suitable bakeout.

Standard ConFlat (CF) Flange Compatibility

All ports utilize industry-standard ConFlat (CFF) flanges with oxygen-free copper gaskets for leak-tight, bakeable seals capable of withstanding temperatures up to 450°C. Available in a wide range of sizes from 1.33" (DN16) to 10" (DN200) or larger, the sexless flange design ensures easy integration with existing UHV components, pumps, gauges, and feedthroughs without compatibility concerns.

Fully Customizable Configuration

Tailored to your exact requirements, each chamber offers complete flexibility in port placement, quantity, and orientation for optimal access and line-of-sight. Additional options include custom mounting features such as threaded holes, external brackets, base plates, or stands for secure integration into your system. Internal features like grabber grooves, support shelves, or reinforced walls can be incorporated for mounting manipulators, storing samples, and/or calibrating instruments. Off-axis and offset ports are no problem, and we can also put ports-in-ports as required. Need a custom re-entrant or an obscure geometry? Our engineers will find a way to get your chamber needs.

Superior Construction and Finish

Chambers are precision-welded for complete integrity and undergo rigorous helium leak testing to rates better than 2 × 10^{-10} mbar·l/s. Electropolishing is standard to minimize surface area and adsorption, reduce outgassing, and enhance cleanliness, making these chambers ideal for contamination-sensitive processes. Viewports, electrical feedthroughs, thermocouple ports, load-locks, transfer ports, and pumping ports can be added as needed.

Compact and Efficient Design

Available in cylindrical, spherical, cubic, rectangular, or ‘we can weld whatever shape you draw on a napkin’ geometries to suit your space and pumping efficiency needs. The modular design allows seamless clustering with additional chambers or components while maintaining a minimal footprint. Custom flange-to-body distances and overall dimensions ensure perfect fit without excess volume that could prolong pump-down times.

Since custom fabrication is our specialty and often costs no more than off-the-shelf alternatives, specify your port layout, material preferences, and any special features at the time of order for a chamber optimized precisely for your application.

Options

CONTACT FACTORY FOR CUSTOMIZATIONS AND ADDITIONAL OPTIONS