Probe Stations
The term ‘Probe Station’ covers a wide range of devices used to position analytical or test probes for non-destructive electrical testing at various locations on test samples. The examples here show a wide variety of different sizes and types available for use in semiconductors, material science, physics, optics, and MEMS. All have been tailored specifically for the end user’s unique access, range, temperature and test requirements. These are intended to show the range of possibilities from the MTS custom design and fabrication shop and the list is hardly exhaustive. Please contact us to discuss your particular needs.
Medium Sample Size – 2″ (50 mm)
Based around 8″ (CF150) flanges, this station features:
- Double wall, water-cooled jacket
- Up to 6 probe manipulators
- Operation from UHV to ambient
- Heating to >900C in 1 atm. O2
- Large viewing area for microscope access
- Shutters to prevent radiation losses
- Vibration Isolation Table
- High Precision Micromanipulators <0.0001″ (<2µ)
- Motorized stages available
- LHe cooling available to <18K
- Additional ports for gauges, inlets, etc.